NM Fundamentals Explained
NM Fundamentals Explained
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The resolutions of the "fourteen nm" product are challenging to reach in a very polymeric resist, Despite electron beam lithography. Moreover, the chemical results of ionizing radiation also limit trusted resolution to about 30 nm, which happens to be also achievable working with existing point out-of-the-artwork immersion lithography. Hardmask components and various patterning are needed.
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The process can assistance various threshold voltages, and options twelve-metallic interconnect layers with The underside two manufactured from cobalt. This is often The 1st time cobalt is Utilized in a high volume manufacturing node. due to at any time shrinking geometries the wires get smaller sized Every node.
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